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Mikromechanik
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keywords:("Mikromechanik")
Femtosecond laser microfabrication of subwavelength structures in photonics [6459-10]
Deep-UV laser-based nano-patterning with holographic techniques [6459-14]
Potentials of fiber laser technology in microfabrication [6459-18]
Laser micromachining of optical biochips [6459-08]
Nonsilicon micromachining for MOEMS elements [3276-28]
Microlens arrays formed by melting photoresist and ion beam milling [3276-27]
Piezoelectrical elements for micro-optical applications (Invited Paper) [3276-22]
Fabrication of micro-optical surface profiles by using grayscale masks [3276-29]
In-package active fiber optic micro-aligner [3276-20]
MEMS-based microgratings: preliminary results of novel configurations [3276-19]
Strength of indium-phosphide-based microstructures [3008-28]
Micro-opto-electro-mechanical (MOEM) adaptive optic system (Invited Paper) [3008-02]
Optical communication link using a micromachined corner cube reflector [3008-20]
Microjoinery for optomechanical systems [3008-49]