1–7 von 7 Ergebnissen
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    Focusing ring lifting mechanism and device for improving etching uniformity of cavity

    Freier Zugriff
    YE LINKE / SHEN JI / TANG JIEFENG et al. | Europäisches Patentamt | 2023

    Gas collection device based on radio frequency ionization

    Freier Zugriff
    DING LIANG / ZHAO HUA / REN QIONGYING et al. | Europäisches Patentamt | 2020

    Lifting mechanism and semiconductor process equipment

    Freier Zugriff
    WANG ZENGHUI / ZHENG YOUSHAN / FENG LYUCHEN | Europäisches Patentamt | 2022

    EFFICIENCY IMPROVEMENTS FOR A MAGNETIC FIELD PROPULSION DRIVE

    Freier Zugriff
    MAY LUTZ | Europäisches Patentamt | 2021

    臭氧发生装置、空调装置及车辆

    Freier Zugriff
    Europäisches Patentamt | 2023

    Substrate receiving region for processing chamber

    Freier Zugriff
    MAY WALTER | Europäisches Patentamt | 2022