The invention relates to a device (10) for holding a workpiece (30) in a processing chamber. The invention also relates to a coating system (20) and to a method for coating a workpiece (30). The aim of the invention is to allow a precise adjustment of the height of the position of a workpiece (30) while supporting the workpiece in a safe and stable manner. This is achieved in that the holding device (10) comprises a tray (72) for the workpiece (30), and a first height-adjustable support element (22) and a second height-adjustable support element (48) for the tray (72), each of the support elements (22, 48) comprising at least one first and one second limb element (26, 56), and in each case one of the first and second limb elements (26, 56) is arranged in the holding device (10). The first and second limb elements (26, 56) are coupled to pivot relative to each other about pivot axes X, Y, the pivot axis X of the first support element (22) being arranged at an angle to the pivot axis Y of the second support element (48).
本发明涉及一种用于将工件(30)保持在处理室中的装置(10)。本发明还涉及一种涂覆系统(20)和一种用于对工件(30)进行涂覆的方法。本发明的目的是允许精确调节工件(30)的位置的高度同时以安全且稳定的方式支承工件。这由于下述而实现:保持装置(10)包括用于工件(30)的托盘(72)、以及用于托盘(72)的高度可调节的第一支承元件(22)和高度可调节的第二支承元件(48),其中,支承元件(22、48)中的每个支承元件包括至少一个第一和第二肢部元件(26、56),并且在每种情况下,第一和第二肢部元件(26、56)联接成围绕枢转轴线X、Y相对于彼此枢转,第一支承元件(22)的枢转轴线X布置成与第二支承元件(48)的枢转轴线Y成一角度。
Substrate receiving region for processing chamber
用于处理室的基底接纳区域
2022-08-30
Patent
Elektronische Ressource
Chinesisch
IPC: | H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last / C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL / F16M Rahmen, Gehäuse oder Grundplatten von Kraftmaschinen oder anderen Maschinen oder von Apparaten, nicht auf eine besondere Art von Maschine oder Apparat eingeschränkt, die anderweitig vorgesehen ist , FRAMES, CASINGS, OR BEDS, OF ENGINES OR OTHER MACHINES OR APPARATUS, NOT SPECIFIC TO AN ENGINE, MACHINE, OR APPARATUS PROVIDED FOR ELSEWHERE / H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS |
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