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    High reflectance coatings for space applications in the EUV

    Keski-Kuba, R.A.M. / Gum, J.S. / Osantowski, J.F. et al. | Tema Archiv | 1993
    silicon carbide (CVD-SiC), SiC films and multilayer coatings is discussed in the context of EUV instrumentation design. The EUV performance of ...
    Schlagwörter: Multilayer-Technik (Schaltung)