Synonyme wurden verwendet für:
data
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data storage
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for
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industries
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metrology
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semiconductor,
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storage
Suche ohne Synonyme:
title: Optical metrology roadmap for the semiconductor, optical, and data storage industries
Ellipsometry: a sophisticated tool for optical metrology (Invited Paper) [4099-23]
Optical microscopy at sub-0.1-mum resolution for semiconductor applications [4099-03]
2D-area/3D-volume holographic optical storage nanotechnology [4099-22]
Evaluating optical and supersmooth surface using AFM in optical manufacturing technology [4099-07]
Present and future interference microscope systems for magnetic head metrology [4099-21]
Advanced methods for surface and subsurface defect characterization of optical components [4099-34]
New procedure for the optical characterization of high-quality thin films [4099-16]
Optical characterization of doping profiles in silicon [4099-04]
DUV/VUV light scattering measurement of optical components for lithography applications [4099-10]
Optical testing of long cylindrical lenses by means of scanning deflectometry [4099-17]
X-ray study of the roughness of surfaces and interfaces [4099-12]
Investigations of transmittance and reflectance in the DUV/VUV spectral range [4099-36]
Calibration requirements for identifying and sizing wafer defects by scanner measurements [4099-38]
Fast-scanning ellipsometry for thin film characterization [4099-39]
Numerical investigation of the resolution in solid immersion lens systems [4099-28]