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Feinwerktechnik
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keywords:("Feinwerktechnik")
Evaluation of Running Safety for Railway vehicles Based on Vibration Acceleration of Bogie
Laser Trapping Using a Fiber Axicon Microlens
Design of the Inverter Motor Drive System Applied to PFC using Interleaving Method
Development of Lightweight Moving Table for Linear Motor using Composite Materials
Deep-UV laser-based nano-patterning with holographic techniques [6459-14]
Potentials of fiber laser technology in microfabrication [6459-18]
Femtosecond laser microfabrication of subwavelength structures in photonics [6459-10]
Laser micromachining of optical biochips [6459-08]
Nonsilicon micromachining for MOEMS elements [3276-28]
Microlens arrays formed by melting photoresist and ion beam milling [3276-27]
Piezoelectrical elements for micro-optical applications (Invited Paper) [3276-22]
Fiber optic MEMS pressure sensors based on evanescent field interaction [3276-31]
MEMS-based diffractive optical-beam-steering technology [3276-07]
Strength of indium-phosphide-based microstructures [3008-28]
Micro-opto-electro-mechanical (MOEM) adaptive optic system (Invited Paper) [3008-02]
Fabrication of micro-optical surface profiles by using grayscale masks [3276-29]
In-package active fiber optic micro-aligner [3276-20]
MEMS-based microgratings: preliminary results of novel configurations [3276-19]
Fill factor improvement using microlens arrays [3276-12]
Resonating large-angle and low-consumption micromachined optical scanner [3276-09]
Application of micro- and nanotechnologies for the fabrication of optical devices [3276-100]
Optical communication link using a micromachined corner cube reflector [3008-20]
Microjoinery for optomechanical systems [3008-49]
Optical probe for micromachine performance analysis [3008-06]
Micro-optic fabrication using one-level gray-tone lithography [3008-32]
Microjet printing of anamorphic microlens arrays [2687-11]
Magnetically actuated MEMS scanning mirror [2687-06]
Recent achievements on MOEM systems at Micromachine Center (MMC) (Invited Paper) [2687-01]
Designs to improve polysilicon micromirror surface topology [3008-11]
New intensity GaAs electro-optic modulator realized by intersecting waveguides [3008-39]
Micro-optical and optomechanical systems fabricated by the LIGA technique (Invited Paper) [3008-31]
Dielectric microfilter arrays for multispectral measuring devices [3008-30]
InP-based micromechanical tunable and selective photodetector for WDM systems [3008-07]
Optimum design of GaAs waveguides intersecting modulator [3276-13]
Optical measurement of LIGA milliengine performance [3276-02]
System integration of micro-optical systems for beam steering and modulation applications [3276-08]
MOEM scan engine for bar code reading and factory automation (Invited Paper) [3276-06]
Polymer waveguides for telecom, datacom, and sensor applications (Invited Paper) [3276-01]