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Halbleiterbauelement
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keywords:("Halbleiterbauelement")
Optimization of optical coatings for the UV/VUV range (Invited Paper) [5188-11]
Single steady frequency and narrow-linewidth external-cavity semiconductor laser [5188-46]
A review of the emerging SEMI standards for particle scanners [5188-48]
Laser-induced fluorescence of calcium fluoride at 193 and 157 nm excitation [5188-15]
Characterization of Ag-Sb-Te alloy and its films for phase-change optical memories [5188-27]
Optical characterization in wide spectral range by a coherent spectrophotometer [5188-05]
Characterization of polarization aberrations in liquid crystal devices (Invited Paper) [5188-01]
Localization of sub-100-nm particles on wafers with solid state detector arrays [5188-35]
Mueller matrix polarimeter in 157 nm [5188-18]
Double-diode configuration of self-calibrating photodiodes [5188-42]
Phase-shifting algorithm via wavelength tuning based on temporal Fourier transform [5188-41]
Absolute high-accuracy deflectometric measurement of topography [5188-39]