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Feinwerktechnik
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keywords:("Feinwerktechnik")
Automatic test equipment for the micromirror array [3276-10]
Fill factor improvement using microlens arrays [3276-12]
Resonating large-angle and low-consumption micromachined optical scanner [3276-09]
Application of micro- and nanotechnologies for the fabrication of optical devices [3276-100]
Ferroelectric PZT thin films on Si and SBN substrates [3008-42]
Fabrication of optical waveguides by the diffusion of Disperse Red 1 dye [3008-38]
Fabrication and application of subwavelength gratings [3008-26]
Optical transformer and collimator for efficient fiber coupling (Invited Paper) [3008-19]
Optical displacement measurement using a monolithic Michelson interferometer [3008-16]
Microactuated mirrors for beam steering [3008-10]
Micromachined microscanners for optical scanning [3008-09]
New intensity GaAs electro-optic modulator realized by intersecting waveguides [3008-39]
Micro-optical and optomechanical systems fabricated by the LIGA technique (Invited Paper) [3008-31]
Dielectric microfilter arrays for multispectral measuring devices [3008-30]
InP-based micromechanical tunable and selective photodetector for WDM systems [3008-07]