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Feinwerktechnik
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keywords:("Feinwerktechnik")
Monolithically integrated refractive microlens standing perpendicular to the substrate [2687-21]
FPAs and thin film binary optic microlens integration (Invited Paper) [2687-09]
Ferroelectric PZT thin films on Si and SBN substrates [3008-42]
Fabrication of optical waveguides by the diffusion of Disperse Red 1 dye [3008-38]
Fabrication and application of subwavelength gratings [3008-26]
Optical transformer and collimator for efficient fiber coupling (Invited Paper) [3008-19]
Optical displacement measurement using a monolithic Michelson interferometer [3008-16]
Microactuated mirrors for beam steering [3008-10]
Micromachined microscanners for optical scanning [3008-09]
High-resolution Mueller matrix polarimetry of thin film PLZT electro-optic modulators [3008-46]
Electromagnetic near-field induced by surface defects in microstructures [3008-40]
Method of computer-controlled microlens processing and testing [3008-35]
Novel method for making parabolic grating [2687-17]
Actuation of polysilicon surface-micromachined mirrors [2687-07]
Silicon mirror arrays fabricated by using bulk and surface micromachining [3008-34]