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41–60 von 65 Ergebnissen
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    Diffractive solid immersion lenses: characterization and manufacturing [4449-29]

    Brunner, R. / Bischoff, J. / Rudolf, K. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Combined metrology including VUV spectroscopic ellipsometer and grazing x-ray reflectance for precise characterization of thin films and multilayers at 157 nm [4449-06]

    Boher, P. / Evrard, P. / Piel, J. P. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Numerical investigation of the resolution in solid immersion lens systems [4099-28]

    Bischoff, J. / Brunner, R. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Present and future interference microscope systems for magnetic head metrology [4099-21]

    Caber, P. J. / Olszak, A. G. / Ragan, C. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Advanced methods for surface and subsurface defect characterization of optical components [4099-34]

    Steinert, J. / Gliech, S. / Wuttig, A. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Accuracy of the thin metallic wires diameter using Fraunhofer diffraction technique [4099-31]

    Serroukh, I. / Martinez-Anton, J. C. / Bernabeu, E. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Ellipsometry: a sophisticated tool for optical metrology (Invited Paper) [4099-23]

    Azzam, R. M. A. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Calibration tool for a CCD-camera-based vision system [4099-19]

    Xu, G. / Tan, S. L. / Low, S. P. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    DUV/VUV light scattering measurement of optical components for lithography applications [4099-10]

    Gliech, S. / Steinert, J. / Flemming, M. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    New procedure for the optical characterization of high-quality thin films [4099-16]

    Bosch, S. / Leinfellner, N. / Quesnel, E. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Measurement of total integrated scatter of optical coatings for 157-nm lithography [4449-04]

    Saito, T. / Saito, J. / Nakamura, E. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Measurement of steep aspheres: a step forward to nanometer accuracy [4449-25]

    Weingartner, I. / Schulz, M. / Thomsen-Schmidt, P. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    IR spectroscopic ellipsometry for industrial characterization of semiconductors [4449-09]

    Boher, P. / Bucchia, M. / Piel, J. P. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Present and future industrial metrology needs for qualification of high-quality optical microlithography materials (Invited Paper) [4449-01]

    Engel, A. / Morsen, E. / Jordanov, A. et al. | British Library Conference Proceedings | 2001
    Schlagwörter: semiconductor industries , data storage industries

    Multiscale mapping technique for the simultaneous estimation of absorption and partial scattering of optical coatings [4099-11]

    Gatto, A. / Commandre, M. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Investigation on total scattering at 157 nm and 193 nm [4099-09]

    Kadkhoda, P. / Welling, H. / Gunster, S. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Calibration requirements for identifying and sizing wafer defects by scanner measurements [4099-38]

    Stover, J. C. / Scheer, C. A. / SPIE | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Spectrophotometric determination of absorption in the DUV/VUV spectral range for MgF~2 and LaF~3 thin films [4099-35]

    Gunster, S. / Ristau, D. / Bosch, S. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Fast-scanning ellipsometry for thin film characterization [4099-39]

    Berge, C. / Krasilnikova, A. / Masetti, E. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries

    Development of an automated optical system for the analysis of etch pits density and distribution on semiconductor materials [4099-02]

    Dedavid, B. A. / da Costa, E. M. / Soares, A. B. et al. | British Library Conference Proceedings | 2000
    Schlagwörter: semiconductor industries , data storage industries