1–11 von 11 Ergebnissen
|

    AIAA-2004-6747 Application Oriented Micro-Nano Electro Mechanical Systems

    Esashi, M. | British Library Conference Proceedings | 2004

    Physics of the micro world and micromachines

    Esashi, M. | British Library Online Contents | 1996

    Silicon Bulk Micromachining in Tohoku University

    Minami, K. / Esashi, M. | British Library Online Contents | 1996

    Micromachined probe for high density data storage

    Ono, T. / Phan Ngoc Minh, / Dong-Weon Lee, et al. | IEEE | 2001

    Research and Development of Wireless and Battery-less Pressure Sensor using MEMS technology

    Hashimoto, S. / Kanda, Y. / Onishi, K. et al. | British Library Conference Proceedings | 2008

    Micromachined Probe for High Density Data Storage

    Ono, T. / Minh, P. N. / Lee, D.-W. et al. | British Library Conference Proceedings | 2001

    B/Ti multilayer reactive igniter for micro solid rocket array thruster

    Tanaka, S. / Kondo, K. / Habu, H. et al. | Tema Archiv | 2007

    Applications of MEMS Technology

    Esashi, M. / Ono, T. / Tanaka, S. et al. | British Library Conference Proceedings | 2004

    MEMS-based Solid Propellant Rocket Array Thruster

    Tanaka, S. / Hosokawa, R. / Tokudome, S.-i. et al. | British Library Conference Proceedings | 2002

    Bulk micromachining for sensors and actuators [4179-201]

    Esashi, M. / International Society for Optical Engineering / Semiconductor Equipment and Materials International et al. | British Library Conference Proceedings | 2000

    Solid Propellant Rocket Array Thruster for Micro-spacecrafts

    Hosokawa, R. / Tanaka, S. / Esashi, M. et al. | British Library Conference Proceedings | 2001