Polarized light scattering from metallic particles on silicon wafers [4449-39]
Measurement of the elastic constants of nanometric films [4449-16]
X-ray study of surfaces and interfaces [4449-31]
Effects of particle shape on particle identification and scatter predictions [4449-18]
Stitching interferometry of aspherical surfaces [4449-34]
Accurate sizing of deposited PSL spheres from light scatter measurements [4449-19]
AFM tip calibration using nanometer-sized structures induced by ion beam sputtering [4449-28]
Measurement of absorptance of optical coatings for F~2 lithography [4449-02]
Quasi-confocal extended field surface sensing [4449-23]