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Design and validation of a single-SOI-wafer 4-DOF crawling microgripper
Deep Reactive-Ion Etched Micro Valves for Spacecraft Propulsion
Wafer scale integration enabling space science
Flow and Heat Transfer in a Cross-Linked Silicon Microchannel Heat Sink
Hydrogen-Helium Leak Detection at Elevated Pressures and Low Temperatures
High aspect-ratio dry-release poly-silicon MEMS technology for inertial-grade microgyroscopes
Development of a single-mass five-axis MEMS motion sensor
Design of a MEMS Resonant Wind Sensor on Airplane Wing
A silicon micromachined gyroscope and accelerometer for vehicle stability control system
Fabrication of microshutter arrays for space application
MEMS technology at NASA's Jet Propulsion Laboratory