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Mikromechanik
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keywords:("Mikromechanik")
Deep-UV laser-based nano-patterning with holographic techniques [6459-14]
Potentials of fiber laser technology in microfabrication [6459-18]
Femtosecond laser microfabrication of subwavelength structures in photonics [6459-10]
Laser micromachining of optical biochips [6459-08]
ADXL103/203 - Eine neue Generation von low-g-Sensoren von Analog Devices Inc.
Nonsilicon micromachining for MOEMS elements [3276-28]
Microlens arrays formed by melting photoresist and ion beam milling [3276-27]
Piezoelectrical elements for micro-optical applications (Invited Paper) [3276-22]
Fiber optic MEMS pressure sensors based on evanescent field interaction [3276-31]
MEMS-based diffractive optical-beam-steering technology [3276-07]
Strength of indium-phosphide-based microstructures [3008-28]
Micro-opto-electro-mechanical (MOEM) adaptive optic system (Invited Paper) [3008-02]
Fabrication of micro-optical surface profiles by using grayscale masks [3276-29]