A great amount of effort has been devoted to the constant improvement of basic performance factors of automobile such as drivability, safety and reliability, which result in clean exhaust emission and fuel economy. During the improvement processes, surface and thin-film techniques based on plasma technology played an important role in the practical applications of thin-film devices, sensors and surface modification. This review paper mainly provides the recent applications of plasma thin-film technique to electronics devices in automobile. The following examples are included. Firstly, the effect of water chemisorption on dielectric films on crystallographic orientation of sputter-deposited Ti films in Al-Si-Cu/Ti/TiN/Ti/dielectric structures was studied using RHEED and XRD. The results showed that water chemisorption has an influence on the preferred orientation of Ti and Al-Si-Cu films, resulting in excellent electromigration performance of the layered films. Secondly, hydrophobic surface treatment by sputtered thin films. Finally, future challenges to applications of plasma thin-film technology in automobiles will be discussed.


    Zugriff

    Zugriff über TIB

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Thin Film A.C. Electroluminescense for Automobile Instruments

    Yokoyama,M. / Nippon Seiki,JP | Kraftfahrwesen | 1985


    Thin Film A.C. Electroluminescence for Automobile Instruments

    Yokoyama, Meiso | SAE Technical Papers | 1985


    Automobile industry

    Holmes, P. / Smith, A. | British Library Conference Proceedings | 1995


    Preference or technology? Evidence from the automobile industry

    Yoo, Sunbin / Wakamori, Naoki / Yoshida, Yoshikuni | Elsevier | 2021