This paper describes the fabrication and characterization of an acceleration switch for automotive applications. With the progress of the 3D-UV microform technology, which enables high aspect ratio patterning in thick photoresists, free standing laterally moveable cantilevers can be fabricated as acceleration switches. This new acceleration sensor concept has the advantage of high EMI immunity. The sensor is provided with a self testing feature which is necessary especially for automotive applications. First devices of the microswitch sensors were characterized by means of optical measurement facilities for the determination of resonance frequencies and the dynamical behaviour. The technological problems in respect to the application are discussed as well as the measurement and characterization techniques.


    Zugriff

    Zugriff über TIB

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    Fabrication and characterization of acceleration switches


    Weitere Titelangaben:

    Fertigung und Charakterisierung von Beschleunigungssensoren


    Beteiligte:
    Tonnesen, T. (Autor:in) / Noetzel, J. (Autor:in) / Frischmuth, G. (Autor:in) / Schulze, S. (Autor:in) / Binder, J. (Autor:in) / Mader, G. (Autor:in)


    Erscheinungsdatum :

    1996


    Format / Umfang :

    4 Seiten, 3 Bilder, 3 Quellen



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    Acceleration threshold switches from an additive electroplating MEMS process

    Michaelis, S. / Timme, H.J. / Wycisk, M. et al. | Tema Archiv | 2000


    Fabrication and testing of polyimide thermo-optic switches [3952-28]

    Taboada, J. M. / An, D. / Shi, Z. et al. | British Library Conference Proceedings | 2000


    Fabrication and testing of polyimide thermo-optic switches [3952-28]

    Taboada, J. M. / An, D. / Shi, Z. et al. | British Library Conference Proceedings | 2000


    Switches. Speed with spring switches

    Engineering Index Backfile | 1928


    Fabrication Of Large Scale LiNbO3 1 x N Optical Switches

    Okabe, Y. / Okayama, H. / Kamijoh, T. | IEEE | 1997