This paper describes the fabrication and characterization of an acceleration switch for automotive applications. With the progress of the 3D-UV microform technology, which enables high aspect ratio patterning in thick photoresists, free standing laterally moveable cantilevers can be fabricated as acceleration switches. This new acceleration sensor concept has the advantage of high EMI immunity. The sensor is provided with a self testing feature which is necessary especially for automotive applications. First devices of the microswitch sensors were characterized by means of optical measurement facilities for the determination of resonance frequencies and the dynamical behaviour. The technological problems in respect to the application are discussed as well as the measurement and characterization techniques.
Fabrication and characterization of acceleration switches
Fertigung und Charakterisierung von Beschleunigungssensoren
1996
4 Seiten, 3 Bilder, 3 Quellen
Aufsatz (Konferenz)
Englisch
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