A novel ceramic package for a two-chip silicon accelerometer and the signal conditioning ASIC chip assembly has been developed with the advantage of being directly mounted on a PC board thus eliminating the need for additional mounting structures for automotive airbag applications. The hermetic package is designed to be mounted either in vertical or flat positions on a PC board, thus enabling the sensing directions of the accelerometer to be parallel or perpendicular to the plane of the PC board for front and side air bag applications. The package has been modeled for thermal stress induced during assembly and operating conditions. The dynamics of the package was determined using static, harmonic, modal, random vibration and transient dynamic modeling. Testing of the mounted package on the shaker shows flat frequency response to 4.5 kHz. Temperature cycling on the unit between -40 deg C and 85 deg C shows no failure or performance degradation over 2400 temperature cycles.
A multilayer ceramic package for silicon micromachined accelerometers
Eine Mehrschichtkeramikbaugruppe für mikrobearbeitete Beschleunigungsmesser aus Silicium
1995
4 Seiten, 5 Bilder, 3 Quellen
Aufsatz (Konferenz)
Englisch
Beschleunigungsmessung , Halbleiteraufnehmer , Messaufnehmer , Silicium , Chip-Montage , Multichip-Schaltung , Mehrschichtschaltung , Mehrschichtleiterplatte , Keramik , Temperaturwechselbeständigkeit , mechanische Schwingung , Wärmespannung , Schaltungssimulation , Frequenzgang , Resonanzfrequenz , Kraftfahrzeugelektrik , Oberflächenmontagetechnologie , Substrat
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