The design, fabrication and testing of a piezoresistive cantilever-beam microaccelerometer is presented for automobile airbag applications. Fabricated devices show a resonant frequency of 2.07 kHz, a sensitivity of 65 microV/g/V with a nonlinearity of 4 % over +/- 50 g ranges. Flat amplitude response and frequency-proportional phase response indicate that 70 % of critical damping level has been accurately achieved in the fabricated devices. Novel aspects of this work include: a skew-symmetric proof-mass design for self-diagnostic capability and zero transverse sensitivity; a multi-step anisotropic etching process for beam thickness control and fillet-rounding formation; and the use of UV-curing paste for silicon-to-glass bonding. It is shown that the new aspects of this work are used to yield a simple, practical and effective mean for improving the performance, reliability, robustness, process simplicity as well as the reproducibility of the accelerometers.


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    Titel :

    A self-diagnostic airbag accelerometer with skew-symmetric proof-mass


    Weitere Titelangaben:

    Ein Beschleunigungssensor mit Selbstdiagnosefähigkeit und schiefsymmetrischer Kontrollmasse für die Airbagsteuerung


    Beteiligte:
    Jong Soo Ko (Autor:in) / Gyu Hyun Kim (Autor:in) / Cho, Young-Ho (Autor:in) / Lee, Kwyro (Autor:in) / Kwak, Byung-Man (Autor:in) / Park, Kwanhun (Autor:in)


    Erscheinungsdatum :

    1995


    Format / Umfang :

    5 Seiten, 6 Bilder, 9 Quellen




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch








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