The design, fabrication and testing of a piezoresistive cantilever-beam microaccelerometer is presented for automobile airbag applications. Fabricated devices show a resonant frequency of 2.07 kHz, a sensitivity of 65 microV/g/V with a nonlinearity of 4 % over +/- 50 g ranges. Flat amplitude response and frequency-proportional phase response indicate that 70 % of critical damping level has been accurately achieved in the fabricated devices. Novel aspects of this work include: a skew-symmetric proof-mass design for self-diagnostic capability and zero transverse sensitivity; a multi-step anisotropic etching process for beam thickness control and fillet-rounding formation; and the use of UV-curing paste for silicon-to-glass bonding. It is shown that the new aspects of this work are used to yield a simple, practical and effective mean for improving the performance, reliability, robustness, process simplicity as well as the reproducibility of the accelerometers.
A self-diagnostic airbag accelerometer with skew-symmetric proof-mass
Ein Beschleunigungssensor mit Selbstdiagnosefähigkeit und schiefsymmetrischer Kontrollmasse für die Airbagsteuerung
1995
5 Seiten, 6 Bilder, 9 Quellen
Aufsatz (Konferenz)
Englisch
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