The authors have been investigating several chemical microsensor technologies for the detection of chemicals found in propellant and rocket exhaust plumes and as contaminants for satellite components. In this work they have developed a catalytic metal sensor for the detection of H2 contamination in electronic device packages. The sensor is based on the resistance of a thin film Pd/Ni alloy. Data have been obtained on its response at room temperature to various levels of H2 as well as the effects of H2O and O2 on its performance. Hydrogen levels to 10.5 ppm have been detected and the responsivity is about twice that of similar sensors. The sensor is insensitive to H2O but its response to H2 is strongly inhibited by O2.
Chemical microsensors for satellite applications
Chemische Mikrosensoren für Satellitenanwendungen
1995
6 Seiten, 9 Bilder, 10 Quellen
Aufsatz (Konferenz)
Englisch
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