In 2001 volume production of the first MEMS-based angular rate sensor for roll-over sensing and navigation control started. In this paper the next generation of a micromachined gyroscope is presented. The new sensor again uses an oscillating disc which is deflected by a coriolis force in case of an angular rate applied. This deflection is measured capacitively by electrodes underneath the disc. The resonance frequency has been increased from 1.5kHz to 5kHz compared with the previous sensor generation. The sensor is packaged in a PLCC44 together with a fully digital signal processing unit. In order to facilitate a broad application the sensor is equipped with a digital output (SPI) as well as with an additional analog output.


    Zugriff

    Zugriff über TIB

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    A new micromachined gyroscope with digital output


    Weitere Titelangaben:

    Ein neues mikrotechnisches Gyroskop mit digitalem Ausgang


    Beteiligte:
    Lang, M. (Autor:in) / Großmann, M. (Autor:in) / Prütz, O. (Autor:in) / Koster, M. (Autor:in) / Franz, J. (Autor:in) / Wucher, G. (Autor:in) / Mayer, T. (Autor:in) / Gangei, A. (Autor:in) / Steiger, E. (Autor:in)


    Erscheinungsdatum :

    2003


    Format / Umfang :

    10 Seiten, 7 Bilder, 1 Tabelle, 8 Quellen



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    A New Micromachined Gyroscope with Digital Output

    Lang, M. / Grossmann, M. / Prutz, O. et al. | British Library Conference Proceedings | 2003


    Micromachined resonant gyroscope [5253-26]

    Qiu, A. / Wang, S. / Zhou, B. et al. | British Library Conference Proceedings | 2003


    Micromachined Gyroscope in Silicon-On-Insulator (SOI) Technology

    Gaisser, A. | British Library Conference Proceedings | 2002


    Micromachined gyroscope in silicon-on-insulator (SOI) technology

    Gaisser, A. / Frech, J. / Hoelzer, G. et al. | Tema Archiv | 2002


    A novel fully-decoupled dual-mass silicon micromachined gyroscope

    Yang Gao, / Hongsheng Li, / Huang, Libin et al. | IEEE | 2016