A PCB (print circuit board)-based micro-thruster and a silicon micro-pump are fabricated and integrated into a novel colloid micro-thruster system. The system works on an electrical colloid propulsion principle. A silicon micro-pump is designed and fabricated as the propellant supplying unit of the micro-thruster system, which obtains the maximal volume-flow rate up to 300 mu l/min and the minimum down to 10 mu l/min, with the flow control precision better than 1 mu l/min. The micro-thruster is fabricated with PCB processing technology, which is simpler and cost-cheaper, compared with other micromachining technologies. For the measurement of micro-thrust, an experiment set-up based on a vibration test is developed and applied to the thruster system. The primary test results show that the PCB-based colloid micro-thruster can produce controllable thrust up to the order of mu N.


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    Titel :

    A colloid micro-thruster system


    Beteiligte:
    Xiong, Jijun (Autor:in) / Zhou, Zhaoying (Autor:in) / Ye, Xiongying (Autor:in) / Wang, Xiaohao (Autor:in) / Feng, Yanyin (Autor:in) / Li, Yonghong (Autor:in)

    Erschienen in:

    Microelectronic Engineering ; 61-62 ; 1031-1037


    Erscheinungsdatum :

    2002


    Format / Umfang :

    7 Seiten, 5 Quellen




    Medientyp :

    Aufsatz (Zeitschrift)


    Format :

    Print


    Sprache :

    Englisch




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