It was during the early seventies that the concept of an micromachined silicon sensor proved its ability to deliver a substantially better performance for aerospace pressure measurement than other traditional technologies available at that time. Due to its inherent operating characteristics and solid state construction, it offered high accuracy, response and overload capability coupled with a virtual insensitivity to severe environmental effects such as vibration, shock and acceleration. Exploiting the piezo-resistive properties of a monolithic silicon diaphragm, with atomically diffused strain gauges arranged in Wheatstone bridge configuration, a continuous high level milli-voltage output can be achieved proportional to applied pressures ranging from tens of millibars upwards. The compact nature of this sensor technology also enabled a modular approach to packaging design.
Micromachined silicon sensors. Measuring up to pressures of the aerospace industry
Mikrobearbeitete Silizium-Sensoren
Measurement and Control ; 34 , 5 ; 132-133
2001
2 Seiten
Aufsatz (Zeitschrift)
Englisch
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