This paper reports on the mathematical modeling of the quadrature error of a microgyroscope due to the imbalance of the flexures. Quadrature error occurs when the proof mass of a microgyroscope oscillates along an axis that is not exactly parallel to the X-axis. The asymmetric spring flexures due to manufacturing variation can cause the proof mass to rotate when a force acts on the proof mass. The mathematical mode is verified using finite element software, Intellicad, and found to have a good agreement with the simulation results for angles of rotation of comb fingers below 5.26 degrees . The mathematical model provides a new avenue of approach in solving the quadrature error problem and in saving the overall simulation time. The spring constant of the fishhook flexure can be calculated form Castigliano's energy theorem and substituted into the mathematical mode to find out the size of the quadrature error. The sensitivity of a fishhook flexure to its dimensions is analyzed.
Mathematical modeling on the quadrature error of low-rate microgyroscope for aerospace applications
2000
11 Seiten, 9 Quellen
Aufsatz (Konferenz)
Englisch
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