This paper presents a design approach applied to a pressure sensor design using the silicon capacitive absolute pressure (SCAP) technology for the sensing element. A brief description introduces the system 'components', i.e., sensing element, electronics and packaging that comprise the transducer. The criteria for a capacitive sensing element in an automotive environment is discussed. A reliable, accurate and cost effective automotive sensor is not only dependent on the selection of the sensing element technology, but also on the engineering tradeoffs made between all components. The tools used to explore and define these tradeoffs, such as computer modeling and laboratory testing, are presented.
Systems approach to semiconductor transducer design
Systemtechnische Methode fuer die Konstruktion eines Halbleiterwandlers
1982
17 Seiten, 8 Bilder, 2 Tabellen, 12 Quellen
Aufsatz (Konferenz)
Englisch
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