An on-chip integrated piezoresistive pressure sensor with both voltage and frequency outputs has been developed. The sensor chip, having a size of 3x3.8 mm2, was realized by the use of a standard bipolar IC process. The output voltage span is 1 to 4 V for a pressure range of 0 to 750 mmHg. The pressure sensitivity of the voltage output is 4 mV/mmHg. The nonlinearity is less than 0.4 % of the full scale. The sensitivity of the frequency output is about 30 kHz for a 750 mmHg change in pressure. The output is in the T2L level. The temperature coefficient of the sensitivity is less than 0.06 % Cel in the temperature range -20 to 110 Cel.
Integrated piezoresistive pressure sensor with both voltage and frequency output
Integrierter Piezowiderstandsdrucksensor mit Spannungs- und Frequenzausgang
Sensors and Actuators ; 4 , 1 ; 113-120
1983
8 Seiten, 8 Bilder, 11 Quellen
Aufsatz (Zeitschrift)
Englisch
SENSOR , DRUCKMESSUNG , CHIP , INTEGRIERTE HALBLEITERSCHALTUNG , PIEZOWIDERSTAND , AUSGANG (ELEKTRISCH) , ELEKTRISCHE SPANNUNG , FREQUENZ , EMPFINDLICHKEIT , BIPOLARSCHALTUNG , TEMPERATURKOEFFIZIENT , AUSGANGSSIGNAL , VERSTAERKER , TEMPERATURKOMPENSATION , SIGNALVERARBEITUNG , TEMPERATURABHAENGIGKEIT , AUTOELEKTRONIK
A piezoresistive integrated pressure sensor
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