Abstract The effect of charging on the atomic oxygen-induced erosion of polyimide was investigated. A polyimide sample was spin-coated on the quartz crystal microbalance (QCM), and mass loss of the film was directly measured from the resonant frequency shift ofQCMduring atomic oxygen exposure. The experiment was carried out using the specially designed QCM, which allowed a sample bias voltage up to 1500 V during resonant frequency measurements. From the experimental results, we confirmed that the erosion rate of polyimide at ±1500 V was almost identical to that of grounded. It was, thus, concluded that the polyimide erosion by atomic oxygen is hardly affected by surface charging. A similar conclusion was also obtained with polysulfone. This conclusion was not consistent with that reported by King et al. [5]. The discrepancy of the experimental results could be due to the surface ionization yield of reaction products.


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    Titel :

    EFFECT OF SURFACE CHARGING ON THE EROSION RATE OF POLYIMIDE UNDER 5 EV ATOMIC OXYGEN BEAM EXPOSURE


    Beteiligte:
    TAGAWA, MASAHITO (Autor:in) / SEIKYU, SHINSUKE (Autor:in) / MAEDA, KEN-ICHI (Autor:in) / YOKOTA, KUMIKO (Autor:in) / OHMAE, NOBUO (Autor:in)


    Erscheinungsdatum :

    01.01.2006


    Format / Umfang :

    9 pages





    Medientyp :

    Aufsatz/Kapitel (Buch)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch