Abstract This paper presents the fabrication of a microcooler consisting of small stainless steel sorption compressor cells, micromachined silicon check valves, and a micromachined cold stage that incorporates glass-tube heat exchangers. The design, fabrication and experiments on the different elements are described. Two compressor cells were thermally cycled to investigate the dynamic behaviour. The cold stage could reach a stable temperature of 169 K with a cooling power of about 200 mW.


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    Titel :

    165 K Microcooler Operating with a Sorption Compressor and a Micromachined Cold Stage


    Beteiligte:
    Burger, J. F. (Autor:in) / Holland, H. J. (Autor:in) / Seppenwoolde, J. H. (Autor:in) / Berenschot, E. (Autor:in) / Brake, H. J. M. (Autor:in) / Gardeniers, J. G. E. (Autor:in) / Elwenspoek, M. (Autor:in) / Rogalla, H. (Autor:in)

    Erschienen in:

    Erscheinungsdatum :

    2002-01-01


    Format / Umfang :

    10 pages




    Medientyp :

    Aufsatz/Kapitel (Buch)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch




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