Abstract This paper presents the fabrication of a microcooler consisting of small stainless steel sorption compressor cells, micromachined silicon check valves, and a micromachined cold stage that incorporates glass-tube heat exchangers. The design, fabrication and experiments on the different elements are described. Two compressor cells were thermally cycled to investigate the dynamic behaviour. The cold stage could reach a stable temperature of 169 K with a cooling power of about 200 mW.
165 K Microcooler Operating with a Sorption Compressor and a Micromachined Cold Stage
Cryocoolers 11 ; 551-560
2002-01-01
10 pages
Aufsatz/Kapitel (Buch)
Elektronische Ressource
Englisch
165 K Microcooler Operating with a Sorption Compressor and a Micromachined Cold Stage
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