A new type of Shack-Hartmann wavefront sensor (SHWS) for optical metrology using digital still camera and a personal computer is designed. There has not expensive image-grabber hardware in this system. We can control image format of storing with this method. In order not to lose information of wavefront, uncompressing image format was selected in our SHWS. We also describe the wavefront reconstruction algorithm in Shack-Hartmann wavefront analyzing software (SHWAS).
Shack-Hartmann wavefront sensor for optical metrology
19th Congress of the International Commission for Optics: Optics for the Quality of Life ; 2002 ; Florence,Italy
Proc. SPIE ; 4829
2003-11-19
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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