One-hundred-nm-resolution holographic aerial image monitoring based on lensless Fourier-transform holography at EUV wavelengths using a synchrotron-based source is described. This method can be used to monitor the coherent imaging performance of EUV lithographic optical systems. The system has been implemented in the EUV phase-shifting point diffraction interferometer (PS/PDI) at Lawrence Berkeley National Lab. Here we introduce the idea of the holographic aerial image recording technique and present imaging performance characterization results of an EUV 10x-reduction Schwarzschild objective.


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    Titel :

    EUV holographic aerial image recording


    Beteiligte:

    Kongress:

    Emerging Lithographic Technologies IV ; 2000 ; Santa Clara,CA,USA


    Erschienen in:

    Erscheinungsdatum :

    2000-07-21





    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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