One-hundred-nm-resolution holographic aerial image monitoring based on lensless Fourier-transform holography at EUV wavelengths using a synchrotron-based source is described. This method can be used to monitor the coherent imaging performance of EUV lithographic optical systems. The system has been implemented in the EUV phase-shifting point diffraction interferometer (PS/PDI) at Lawrence Berkeley National Lab. Here we introduce the idea of the holographic aerial image recording technique and present imaging performance characterization results of an EUV 10x-reduction Schwarzschild objective.
EUV holographic aerial image recording
Emerging Lithographic Technologies IV ; 2000 ; Santa Clara,CA,USA
Proc. SPIE ; 3997
2000-07-21
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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