The physical principles underlying the three-dimensional (3D) laser microstructuring technique are outlined, its applications for the fabrication of 3D photonic crystals are described. Structures recorded by direct laser writing and holographic recording techniques in SU-8 photoresist are presented along with their structural and optical characterization.
Femtosecond laser microfabrication of 3D photonic structures
International Conference on Lasers, Applications, and Technologies 2005: Laser-Assisted Micro- and Nanotechnologies ; 2005 ; St. Petersburg,Russian Federation
Proc. SPIE ; 6161
2006-02-09
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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