The use of laser assisted chemistry for dry etching of semiconductors is described. Both direct laser-driven etching of GaAs and laser-enhanced plasma etching of Si are given as examples.
Laser-Assisted Dry Etching Of Semiconducting Materials
Laser-Assisted Deposition, Etching, and Doping ; 1984 ; Los Angeles,United States
Proc. SPIE ; 0459
1984-06-14
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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