This paper describes the fabrication and operation of a low-cost, monolithic silicon mass-air-flow sensor (MAFS) developed for automotive applications. The device is a hot wire anemometer made of two thin single-crystal silicon beams, one being the heated element and the other serving as a temperature reference. Temperature compensation techniques and the design tradeoffs to maximize performance while ensuring durability in the harsh automotive environment are discussed.


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    Titel :

    A Micromachined Silicon Mass-Air-Flow Sensor


    Weitere Titelangaben:

    Sae Technical Papers


    Beteiligte:
    Stephan, C.H. (Autor:in) / Zanini, M. (Autor:in)

    Kongress:

    International Congress & Exposition ; 1992



    Erscheinungsdatum :

    1992-02-01




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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