This paper describes the fabrication and operation of a low-cost, monolithic silicon mass-air-flow sensor (MAFS) developed for automotive applications. The device is a hot wire anemometer made of two thin single-crystal silicon beams, one being the heated element and the other serving as a temperature reference. Temperature compensation techniques and the design tradeoffs to maximize performance while ensuring durability in the harsh automotive environment are discussed.
A Micromachined Silicon Mass-Air-Flow Sensor
Sae Technical Papers
International Congress & Exposition ; 1992
1992-02-01
Aufsatz (Konferenz)
Englisch
A micromachined silicon mass-air-flow sensor
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