A new generation of production-ready dual function sensor which combines a yaw rate sensor with a linear accelerometer, based on silicon micromachining, is presented. The sensor is designed for mass production and high performance applications such as vehicle control systems. A combination of surface and bulk micromachining leads to an advantage in design, signal evaluation and packaging. This paper discusses the design of the sensing elements: the yaw rate sensor consists of two bulk micromachined oscillating masses each of which supports a surface micromachined accelerometer for detection of the coriolis force. The sensing element for the linear acceleration is a separate surface micromachined accelerometer. The electrodynamic actuation and high Q-value of the oscillator allow packaging at atmospheric pressure. Characterization results of the device are presented.


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    Titel :

    A Precision Yaw Rate Sensor in Silicon Micromachining


    Weitere Titelangaben:

    Sae Technical Papers


    Beteiligte:
    Maihöfer, B. (Autor:in) / Schubert, D. (Autor:in) / Gerstenmeier, J. (Autor:in) / Marek, J. (Autor:in) / Lutz, M. (Autor:in) / Golderer, W. (Autor:in)

    Kongress:

    International Congress & Exposition ; 1998



    Erscheinungsdatum :

    1998-02-23




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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