This paper describes the use of the electron microprobe analyzer as an analytical tool for microelectronic devices. A comprehensive description of the construction and working of the electron microprobe analyzer is first presented. Included is a brief description of some of the basic physical laws regarding X-ray generation and analysis.Three major innovations which have made the probe the tool for microelectronic analysis are described in detail; these are: the electron beam scanning system, secondary electron display, and high resolution nondispersive energy analysis.Several examples are shown Of how these techniques may be applied to microelectronic analysis.


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    Titel :

    New Uses of the Electron Microprobe Analyzer in Analysis of Integrated Circuits and Packages


    Weitere Titelangaben:

    Sae Technical Papers


    Beteiligte:
    Hitt, G. E. (Autor:in) / Solomon, J. L. (Autor:in)

    Kongress:

    Micro Electronic Packaging Conference ; 1968



    Erscheinungsdatum :

    1968-02-01




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch





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