Fabrication of high‐quality ultrathin monocrystalline silicon layers and their transfer to low‐cost substrates are key steps for flexible electronics and photovoltaics. In this work, we demonstrate a low‐temperature and low‐cost process for ultrathin silicon solar cells. By using standard plasma‐enhanced chemical vapor deposition (PECVD), we grow high‐quality epitaxial silicon layers (epi‐PECVD) from SiH 4 /H 2 gas mixtures at 175 °C. Using secondary ion mass spectrometry and transmission electron microscopy, we show that the porosity of the epi‐PECVD/crystalline silicon interface can be tuned by controlling the hydrogen accumulation there. Moreover, we demonstrate that 13–14% porosity is a threshold above which the interface becomes fragile and can easily be cleaved. Taking advantage of the H‐rich interface fragility, we demonstrate the transfer of large areas (∽10 cm 2 ) ultrathin epi‐PECVD layers (0.5–5.5 µm) onto glass substrates by anodic bonding and moderate annealing (275–350 °C). The structural properties of transferred layers are assessed, and the first PECVD epitaxial silicon solar cells transferred on glass are characterized. Copyright © 2016 John Wiley & Sons, Ltd. In this work, we demonstrate a low‐temperature and low‐cost process for ultrathin silicon solar cells. Taking advantage of the H‐rich interfaces fragility, we demonstrate the transfer of large areas (∽10 cm 2 ) ultrathin epitaxial plasma‐enhanced chemical vapor deposition (PECVD) layers (0.5–5.5 µm) onto a glass substrate by anodic bonding and moderate annealing (3 min–350 °C). The structural properties of transferred layers are assessed, and the first PECVD epitaxial silicon solar cells transferred on glass are characterized.


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    Titel :

    Ultrathin PECVD epitaxial Si solar cells on glass via low‐temperature transfer process



    Erschienen in:

    Progress in photovoltaics ; 24 , 8 ; 1075-1084


    Erscheinungsdatum :

    2016




    Medientyp :

    Aufsatz (Zeitschrift)


    Format :

    Print


    Sprache :

    Englisch



    Klassifikation :

    BKL:    53.36 Energiedirektumwandler, elektrische Energiespeicher






    Making Ultrathin Solar Cells

    Cogan, George W. / Christel, Lee A. / Merchant, J. Thomas et al. | NTRS | 1991