Studies on the structural properties of SiO:H films prepared from (SiH4+CO2+He) plasma in RF-PECVD
Solar energy materials & solar cells ; 93 , 5
2009
Aufsatz (Zeitschrift)
Englisch
Studies on the structural properties of SiO:H films prepared from (SiH4+CO2+He) plasma in RF-PECVD
Online Contents | 2009
|Characterization of undoped mc-SiO:H films prepared from (SiH4+CO2+H2)-plasma in RF glow discharge
Online Contents | 2000
|Properties of a-SiO:H films prepared by RF glow discharge
Online Contents | 2000
|a-SiO:H Films and Their Application to Solar Cells
British Library Online Contents | 1994
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