Influence of silane flow on structural, optical and electrical properties of a-Si:H thin films deposited by hot wire chemical vapor deposition (HW-CVD) technique
Solar energy materials & solar cells ; 71 , 2
2002
Aufsatz (Zeitschrift)
Englisch
Structural, optical and electrical characterizations of #956c-Si:H films deposited by PECVD
Online Contents | 2005
|British Library Conference Proceedings | 2008
|Chemical-vapor deposition of silicon from silane
NTRS | 1979
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