This paper reviews the current status of MEMS packaging technology from COTS to specific application provides lessons learned, and finally, identifies a need for systematic approach for this purpose.
Reliability Issues of COTS MEMS for Aerospace Applications
01.01.1999
Sonstige
Keine Angabe
Englisch
accelerometer , Reliability , COTS , aerospace , Systems , Microelectromechanical , Commercial-Off-The-Shelf , sensors , MEMS , environment , Pressure
Reliability Issues of COTS MEMS Packaging
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