A multi-beam LTP is under development at MSFC in collaboration with Lawrence Berkeley National laboratory and Brookhaven National Laboratory. The Multi-beam LTP has been fully assembled. First tests of the MBLTP has demonstrated the feasibility of the multibeam approach. The calibrations are under way. The MBLTP is intended to be used for metrology support of the deterministic polishing experiments.


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    Titel :

    Status of Multi-Beam Long Trace- Profiler Development


    Beteiligte:

    Kongress:

    The International Society of Optics and Photonics Optics + Photonics 2013 Conference-Advances in X-Ray/EUV Optics and Components ; 2013 ; San Diego, CA, United States


    Erscheinungsdatum :

    25.08.2013


    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Keine Angabe


    Sprache :

    Englisch




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