This paper presents the development of a floating-element shear stress sensor that permits the direct measurement of skin friction based on geometric Moir interferometry. The sensor was fabricated using an aligned wafer-bond/thin-back process producing optical gratings on the backside of a floating element and on the top surface of the support wafer. Experimental characterization indicates a static sensitivity of 0.26 microns/Pa, a resonant frequency of 1.7 kHz, and a noise floor of 6.2 mPa/(square root)Hz.
A Micromachined Geometric Moire Interferometric Floating-Element Shear Stress Sensor
42nd AIAA Aerospace Sciences Meeting ; 2008 ; Reno, NV, United States
2004-01-05
Aufsatz (Konferenz)
Keine Angabe
Englisch
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