Shapes of quartz pyrolysis tubes used to deposit Parylene-N on Hgl(2) crystals modified to improve quality of coating. Use of zigzag tube, along with higher processing temperature, resulted in coating of better quality, including greater transparency and more uniformity of appearance. In addition, longer path taken by dimer in passing by baffles increases time spent in high-temperature region, increasing degree of cracking even more.
Furnace Tubes For Depositing Parylene-N(TM) On Hgl(2) Crystals
NASA Tech Briefs ; 18 , 11
01.11.1994
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