Monolithic photovoltaic batteries containing vertical cells include buried CoSi(2) contact layers. Vertical-junction photovoltaic cells in series fabricated in monolithic structure. N- and p-doped silicon layers deposited epitaxially. The CoSi(2) layers, formed by ion implantation and annealing, serve as thin, low-resistance ohmic contacts between cells.
Making CoSi(2) Layers By Ion Implantation
NASA Tech Briefs ; 18 , 1
01.01.1994
Sonstige
Keine Angabe
Englisch
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