Report describes structure, preparation, characterization, and applications of films of amorphous-carbon. Amorphous-carbon films potentially useful as masks in x-ray lithography, layers for passivation of high-speed microelectronic circuits, hard films to protect magnetic recording media and optical components from degradation by chemical etching or wear, and radiation detectors.
Amorphous-Carbon Films
NASA Tech Briefs ; 17 , 7
01.07.1993
Sonstige
Keine Angabe
Englisch
Raman Spectroscopy for Carbon Based Amorphous Thin Films
British Library Conference Proceedings | 2005
|Characterization of hydrogenated amorphous silicon-carbon films deposited by hybrid-plasma CVD
Online Contents | 1994
|Boron-doped diamond-like amorphous carbon as photovoltaic films in solar cell
Online Contents | 2001
|A Comparison of the Tribology of Tetrahedral Amorphous Carbon and Hydrogenated Amorphous Carbon
SAE Technical Papers | 2008
|A comparison of the tribology of tetrahedral amorphous carbon and hydrogenated amorphous carbon
Kraftfahrwesen | 2008
|