Thin films of superconductor YBa(2)Cu(3)O(7-delta), formed on microwave dielectric substrates of SrTiO3, MgO, Al2O3 coated with ZrO2, and LaAlO3. Films formed by repeated sequential desposition of layers of Cu, BaF2, and Y in electro-beam evaporator, followed by annealing in oxygen. Technique employed gives layers uniformity and reproducibility required for fabrication of microwave circuits.
Superconducting Films On Microwave Dielectric Substrates
NASA Tech Briefs ; 16 , 10
1992-10-01
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