Hard, amorphous hydrogenated carbon films of diamondlike quality deposited at room temperature on silicon, optical glass, and quartz through decomposition of CH4 in electron-cyclotron-resonance (ECR) microwave plasma of CH4 diluted with H2. Technique provides hard, abrasion-resistant coatings for lenses and other optical components. Films chemically inert and posses high electrical resistivity and breakdown fields, valuable properties in microelectronics applications.


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    Titel :

    Deposition Of Diamondlike Films By ECR Microwave Plasma


    Beteiligte:

    Erschienen in:

    Erscheinungsdatum :

    01.10.1991



    Medientyp :

    Sonstige


    Format :

    Keine Angabe


    Sprache :

    Englisch


    Schlagwörter :


    Depositing Diamondlike Carbon Films

    Mirtich, M. J. / Sovey, J. S. / Banks, B. A. | NTRS | 1986


    Making Diamondlike Films More Transparent

    Mirtich, Michael J. / Kussmaul, Michael T. / Sovey, James S. et al. | NTRS | 1994


    Pulsed laser deposition and laser machining of diamondlike carbon films [3423-56]

    Martellucci, S. / Messina, G. / Paoletti, A. et al. | British Library Conference Proceedings | 1998