Liquid-phase epitaxial (LPE) growth boat redesigned. Still fabricated from ultra-high-purity graphite, but modified to permit easy disassembly and cleaning, along with improved wiping action for more complete removal of melt to reduce carry-over of gallium. Larger substrates and more uniform composition obtained.
Improved Boat For Liquid-Phase Epitaxy
NASA Tech Briefs ; 15 , 7
1991-07-01
Sonstige
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Englisch