Oxidation of semiconductors and high-temperature superconductors achieved at lower temperatures by use of oxygen molecules or atoms raised into specific excited states. Use of excited oxygen (or other species) of interest in research on kinetics and mechanisms of chemical reactions. Used in ultra-high-vacuum chamber also equipped for such surface-analytical techniques as x-ray photoelectron spectroscopy.
Making Excited Oxygen Molecules And Atoms
NASA Tech Briefs ; 13 , 9
1989-09-01
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Englisch