Seed particles for fluidized-bed production of silicon made by new contamination-free, economical method. In new method, large particles of semiconductor-grade silicon fired at each other by high-speed streams of gas and thereby break up into particles of suitable size for fluidized bed. No foreign materials introduced, and leaching unnecessary. Method used to feed fluidized-bed reactor for continuous production of high-purity silicon.
High-Purity Silicon Seeds for Silane Pyrolysis
NASA Tech Briefs ; 9 , 1
1985-06-01
Sonstige
Keine Angabe
Englisch
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