Modified Czochralski setup grows several large crystals in succession from one crucible. Modified apparatus is expected to reduce cost per crystal by about 50 percent. Key features are: isolation valve between growth and pulling chamber, and recharging mechanism. Functional changes reduce cycle time and prolong crucible life.
Modified Silicon Furnace Lowers Crystal Cost
NASA Tech Briefs ; 7 , 1
1983-03-01
Sonstige
Keine Angabe
Englisch
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