Modified Czochralski setup grows several large crystals in succession from one crucible. Modified apparatus is expected to reduce cost per crystal by about 50 percent. Key features are: isolation valve between growth and pulling chamber, and recharging mechanism. Functional changes reduce cycle time and prolong crucible life.


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    Titel :

    Modified Silicon Furnace Lowers Crystal Cost


    Beteiligte:
    Lane, R. L. (Autor:in)

    Erschienen in:

    Erscheinungsdatum :

    01.03.1983



    Medientyp :

    Sonstige


    Format :

    Keine Angabe


    Sprache :

    Englisch


    Schlagwörter :


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