Metallurgical-grade silicon transforms into tribromosilane by reacting it with process byproducts. Tribromosilane is separated from mixture, purified, and finally decomposed in presence of hydrogen in silicon-product reactor. Conversion efficiencies of 30 to greater than 60 percent of tribromosilane to ultrapure granular polycrystalline silicon are typical in produce reactor.
Closed-Loop Process Yields Ultrapure Silicon
NASA Tech Briefs ; 7 , 1
01.03.1982
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Englisch
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