Metallurgical-grade silicon transforms into tribromosilane by reacting it with process byproducts. Tribromosilane is separated from mixture, purified, and finally decomposed in presence of hydrogen in silicon-product reactor. Conversion efficiencies of 30 to greater than 60 percent of tribromosilane to ultrapure granular polycrystalline silicon are typical in produce reactor.


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    Titel :

    Closed-Loop Process Yields Ultrapure Silicon


    Beteiligte:
    Schumacher, J. C. (Autor:in) / Moore, E. B. (Autor:in)

    Erschienen in:

    Erscheinungsdatum :

    01.03.1982



    Medientyp :

    Sonstige


    Format :

    Keine Angabe


    Sprache :

    Englisch


    Schlagwörter :


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